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 ü Medium to Ultra High Vacuum Single Gauge

ü  Brand: INFICON

ü  Origin: Liechtenstein

ü  Measurement range: 5×10-10 to 2×10-2 mbar

ü  Warranty: 12 months

 

 
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Inficon BAG552 – Medium to Ultra High Vacuum Single Gauge

Đại lý ủy quyền INFICON phân phối thiết bị chính hãng tại Việt Nam (Inficon Vietnam) 

Dịch vụ của chúng tôi

ü  Phân phối thiết bị Inficon chính hãng 

ü  Dịch vụ Bảo hành thiết bị Inficon 

ü  Dịch vụ sửa chữa thiết bị Inficon 

ü  Bảo dưỡng và hiệu chuẩn định kỳ thiết bị Inficon

Advantages 

ü  Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range 

ü  2 filaments for Bayard-Alpert system 

ü  Galvanic isolated electronics to avoid electric stray current 

ü  Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream 

ü  Extended bakeability due to removable calibration data chips 

ü  Set point relays 

ü  Bright & big OLED display (90° rotateable) with user interface 

ü  Analog output, RS232C serial interface, EtherCAT® 

ü  Usable in conjunction with VGC50x Controller series 

ü  RoHS compliance

 

Typical applications

 

ü  Pressure measurement in Semiconductor processes 

ü  Industrial coating 

ü  General vacuum measurement and control on systems in the high to ultra high vacuum range

 

Specifications

Type

BAG552

Measurement range (air, O2, CO, N2)

5×10-10 … 2x10-2 mbar, continuous

Accuracy 1 × 10-8 … 2 × 10-2 mbar

±15% of reading

Repeatability

5% of reading, 10-8 … 2 × 10-2 mbar (after 10 min. stabilization)

Switching threshold

on

off

 

2.4×10-2 mbar

3.2×10-2 mbar

Emission current

Sliding mode (default)

p ≤ 8 × 10-7mbar

p > 1 × 10-3mbar

Two-Point-Mode

p ≤ 7.2 × 10-6mbar

3.0 × 10-5 mbar < p < 3.2 × 10-2mbar

Emission current switching

25 µA -> 5 mA

5 mA ->25 µA

 

 

5 mA

25 µA

 

5 mA

25 µA

 

7.2×10-6 mbar

3.0×10-5 mbar

Degas

Emission current (p < 7.2 × 10-6 mbar)

Control input signal

Duration

 

≈16 mA (Pdegas ≈4 W)

0 V/+24 V (dc), active high

≤3 min, followed by automatic stop. A new degas cycle can only be started after a waiting time of 30 min

Output signal

Measuring range

Relationship voltage-pressure

Error signal

 

Minimum load impedance

0                … +10 V

+0.57 … +8.176 V (5×10-10 … 2×10-2 mbar)

1                V/decade, logarithmic

+0.1 V (EEPROM error)

+0.3 V (BA sensor error)

10 kΩ

Power supply

Supply voltage at the gauge

Ripple

Current consumption

Standard

Degas

Emission start (< 200 ms)

Power consumption

BAG552

BAG552 with EtherCAT

Fuse necessary

 

+24 V (dc) (+20 … +28 V (dc))

≤2 Vpp

 

≤0.5 A

≤0.9 A

≤1.4 A

 

≤18 W

≤21 W

1.25 AT

Sensor cable connection

Receptacle

Measuring cable

 

Cable length (supply voltage 24 V)

Analog and fieldbus operation

 

 

RS232C operation

Gauge identification

 

D-sub 15-pin, male

shielded, number of conductors depending on the functions used,

max.15-pin plus shielding

 

≤35 m (0.25 mm2 / conductor)

 ≤50 m (0.34 mm2 / conductor)

≤100 m (1.0 mm2 / conductor)

≤30 m

42 kΩ resistor between pin 10 and pin 5

Switching functions Setpoints

Adjustment range

Relay contact rating

SP1, SP2

5×10-10 … 2x10-2 mbar

≤60 V (dc) / 0.5 A (dc), resistive

Admissible temperature

Storage

Operation

 

Bakeout

 

–2 … +70 °C

0 ... +50 °C

+150 °C (at vacuum connection, without electronics unit and calibration print, horizontally mounted)

Relative humidity

≤65% / 85% (no condensation)year's mean / during 60 days

Interface (digital)

Diagnostic port connection, RS232C, Jack connector. 2.5 m, 3-pin

Materials exposed to vacuum

stainless steel, NiFe, nickel plated, Hastelloy, glass, iridium, yttrium oxide (Y2O3),

Internal volume

 

DN 25 ISO-KF 

≈24 cm3

DN 40 CF-R    

≈34 cm3

Weight

550 ... 760g

Pressure max.

5 bar (absolute)

Mounting orientation

any

Degree of pollution

2

Degree of protection

IP40

     

 

SPECIFICATIONS INTERFACES

 

 

 

RS232C

 

Data rate

9600 Baud

Data format

binary, 8 data bits, one stop bit, no parity bit, no handshake

 

 

EtherCAT®

 

Protocol

EtherCAT®

Communication standards

Semiconductor Device Profile

ETG.5003 Part 1 Common Device Profile

ETG.5003 Part 2080 “Specific Device Profile - Vacuum Pressure Gauge"

Process Data

Fixed PDO mapping and configurable PDO mapping

EtherCAT connector

RJ45, 8-pin (socket), IN and OUT

Cable

Cable length

Shielded Ethernet CAT5e or higher

≤100 m (330 ft.)

Data rate

100000 Kbps

  

ORDERING INFORMATION

  

BAG552

 

PART NUMBER

BAG552 Spare sensor head, 25KF.

 

352-420

BAG552 Spare sensor head, 40CF

 

352-421

 

 

BAG-552-INFICON-Dimention

BAG-552-INFICON-PN

 

 

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