BAG552 Trigon
ü Medium to Ultra High Vacuum Single Gauge
ü Brand: INFICON
ü Origin: Liechtenstein
ü Measurement range: 5×10-10 to 2×10-2 mbar
ü Warranty: 12 months
- Thông tin sản phẩm
- Tài liệu
Inficon BAG552 – Medium to Ultra High Vacuum Single Gauge
Đại lý ủy quyền INFICON phân phối thiết bị chính hãng tại Việt Nam (Inficon Vietnam)
Dịch vụ của chúng tôi
ü Phân phối thiết bị Inficon chính hãng
ü Dịch vụ Bảo hành thiết bị Inficon
ü Dịch vụ sửa chữa thiết bị Inficon
ü Bảo dưỡng và hiệu chuẩn định kỳ thiết bị Inficon
Advantages
ü Pure Bayard-Alpert measuring system for a wide UHV & HV measurement range
ü 2 filaments for Bayard-Alpert system
ü Galvanic isolated electronics to avoid electric stray current
ü Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream
ü Extended bakeability due to removable calibration data chips
ü Set point relays
ü Bright & big OLED display (90° rotateable) with user interface
ü Analog output, RS232C serial interface, EtherCAT®
ü Usable in conjunction with VGC50x Controller series
ü RoHS compliance
Typical applications
ü Pressure measurement in Semiconductor processes
ü Industrial coating
ü General vacuum measurement and control on systems in the high to ultra high vacuum range
Specifications
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Type |
BAG552 |
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Measurement range (air, O2, CO, N2) |
5×10-10 … 2x10-2 mbar, continuous |
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Accuracy 1 × 10-8 … 2 × 10-2 mbar |
±15% of reading |
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Repeatability |
5% of reading, 10-8 … 2 × 10-2 mbar (after 10 min. stabilization) |
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Switching threshold on off |
2.4×10-2 mbar 3.2×10-2 mbar |
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Emission current Sliding mode (default) p ≤ 8 × 10-7mbar p > 1 × 10-3mbar Two-Point-Mode p ≤ 7.2 × 10-6mbar 3.0 × 10-5 mbar < p < 3.2 × 10-2mbar Emission current switching 25 µA -> 5 mA 5 mA ->25 µA |
5 mA 25 µA 5 mA 25 µA 7.2×10-6 mbar 3.0×10-5 mbar |
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Degas Emission current (p < 7.2 × 10-6 mbar) Control input signal Duration |
≈16 mA (Pdegas ≈4 W) 0 V/+24 V (dc), active high ≤3 min, followed by automatic stop. A new degas cycle can only be started after a waiting time of 30 min |
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Output signal Measuring range Relationship voltage-pressure Error signal Minimum load impedance |
0 … +10 V +0.57 … +8.176 V (5×10-10 … 2×10-2 mbar) 1 V/decade, logarithmic +0.1 V (EEPROM error) +0.3 V (BA sensor error) 10 kΩ |
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Power supply Supply voltage at the gauge Ripple Current consumption Standard Degas Emission start (< 200 ms) Power consumption BAG552 BAG552 with EtherCAT Fuse necessary |
+24 V (dc) (+20 … +28 V (dc)) ≤2 Vpp ≤0.5 A ≤0.9 A ≤1.4 A ≤18 W ≤21 W 1.25 AT |
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Sensor cable connection Receptacle Measuring cable Cable length (supply voltage 24 V) Analog and fieldbus operation RS232C operation Gauge identification |
D-sub 15-pin, male shielded, number of conductors depending on the functions used, max.15-pin plus shielding ≤35 m (0.25 mm2 / conductor) ≤50 m (0.34 mm2 / conductor) ≤100 m (1.0 mm2 / conductor) ≤30 m 42 kΩ resistor between pin 10 and pin 5 |
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Switching functions Setpoints Adjustment range Relay contact rating |
SP1, SP2 5×10-10 … 2x10-2 mbar ≤60 V (dc) / 0.5 A (dc), resistive |
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Admissible temperature Storage Operation Bakeout |
–2 … +70 °C 0 ... +50 °C +150 °C (at vacuum connection, without electronics unit and calibration print, horizontally mounted) |
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Relative humidity |
≤65% / 85% (no condensation)year's mean / during 60 days |
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Interface (digital) |
Diagnostic port connection, RS232C, Jack connector. 2.5 m, 3-pin |
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Materials exposed to vacuum |
stainless steel, NiFe, nickel plated, Hastelloy, glass, iridium, yttrium oxide (Y2O3), |
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Internal volume |
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DN 25 ISO-KF |
≈24 cm3 |
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DN 40 CF-R |
≈34 cm3 |
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Weight |
550 ... 760g |
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Pressure max. |
5 bar (absolute) |
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Mounting orientation |
any |
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Degree of pollution |
2 |
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Degree of protection |
IP40 |
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SPECIFICATIONS INTERFACES |
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RS232C |
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Data rate |
9600 Baud |
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Data format |
binary, 8 data bits, one stop bit, no parity bit, no handshake |
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EtherCAT® |
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Protocol |
EtherCAT® |
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Communication standards |
Semiconductor Device Profile ETG.5003 Part 1 Common Device Profile ETG.5003 Part 2080 “Specific Device Profile - Vacuum Pressure Gauge" |
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Process Data |
Fixed PDO mapping and configurable PDO mapping |
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EtherCAT connector |
RJ45, 8-pin (socket), IN and OUT |
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Cable Cable length |
Shielded Ethernet CAT5e or higher ≤100 m (330 ft.) |
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Data rate |
100000 Kbps |
ORDERING INFORMATION
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BAG552 |
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PART NUMBER |
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BAG552 Spare sensor head, 25KF. |
|
352-420 |
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BAG552 Spare sensor head, 40CF |
|
352-421 |
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