BCG552 Trigon

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ü ATM to Ultra High Vacuum Triple Gauge

ü Brand: INFICON

ü Origin: Liechtenstein

ü Measurement range: 5×10^-10 to 1500 mbar

ü Warranty: 12 months

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Inficon BCG552 – ATM to Ultra High Vacuum TripleGauge

Đại lý ủy quyền INFICON phân phối thiết bị chính hãng tại Việt Nam (Inficon Vietnam)

ü Phân phối thiết bị Inficon chính hãng

ü Dịch vụ Bảo hành thiết bị Inficon

ü Dịch vụ sửa chữa thiết bị Inficon

ü Bảo dưỡng và hiệu chuẩn định kỳ thiết bị Inficon

ü 3 + 1 sensing elements for extremely wide measurement range, cost reduction & space savings

ü 2 filaments for Bayard-Alpert system

ü Gas type independent pressure measurement above 10 Torr provides more reliable load lock control for any gas mixtures

ü Differential pressure measurement eliminates uncertainty related to atmospheric pressure changes

ü Automatic high vacuum Pirani adjustment reduces operator interventions

ü Galvanic isolated electronics to avoid electric stray current

ü Sliding emission mode to avoid pressure jumps and freeze when switching the emission stream

ü Set point relays

ü Bright & big OLED display (90° rotatable) with user interface

ü Analog output, RS232C serial interface, EtherCAT®

ü Usable in conjunction with VGC50x Controller series

ü Backwards compatible to TripleGauge® BCG450

ü RoHS compliance

ü Pressure measurement in Semiconductor processes, transfer and loadlock chambers

ü Industrial coating

ü General vacuum measurement and control on systems in the low to ultra high vacuum range

Type	BAG552
Measurement range (air, O₂, CO, N₂)	5×10^-10 … 1500 mbar
Accuracy 950 ... 1050 mbar 50 ... 950 mbar 1 × 10-8 … 50 mbar	± 2.5% of reading ± 5% of reading ± 15 of reading
Repeatability	5% of reading, 1 x 10^-8 … 1050 mbar (after 10 min. stabilization)
Materials exposed to vacuum	stainless steel, NiFe, nickel plating, Hastelloy, glass, iridium, yttrium oxide (Y2O3), Ni, tungsten

Type

BAG552

Measurement range (air, O₂, CO, N₂)

5×10^-10 … 1500 mbar

Accuracy

950 ... 1050 mbar

50 ... 950 mbar

1 × 10-8 … 50 mbar

± 2.5% of reading

± 5% of reading

± 15 of reading

Repeatability