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BPG402-Sx - INFICON

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ü ATM to Ultra High Vacuum Gauge

ü Brand: INFICON

ü Origin: Liechtenstein

ü Measurement range: 3.8×10^-10 to 1000 mbar

ü Warranty: 6 months

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Inficon BPG402 – ATM to Ultra High Vacuum Gauge

Đại lý ủy quyền INFICON phân phối thiết bị chính hãng tại Việt Nam (Inficon Vietnam)

Advantages

ü Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)

ü Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%

ü Pirani interlock protects the filament from premature burnout

ü Two long-life yttrium oxide coated iridium filaments

ü Optional graphic display and Fieldbus interfaces available

ü Automatic high vacuum Pirani adjustment reduces operator interventions

ü Easy to exchange sensing element with on-board calibration data guarantees high reproducibility

ü RoHS compliance

Typical applications

ü Pressure measurement in semiconductor process and transfer chambers

ü Industrial coating

ü General vacuum measurement and control in the low to ultra high vacuum rangeGeneral vacuum measurement and control in the fine and rough vacuum range

Specifications

Measurement range (air, O₂, CO, N₂)

Mbar

5×10^-10 … 1000

Accuracy(N₂)

10^-8 … 10^-2 mbar

% of reading

±15%

Repeatability (air)

10^-8 … 10^-2 mbar

% of reading

Degas 1) p < 7.2 × 10-6 mbar

Electron bombardment, max. 3 min

2 bar

Admissible temperature

Operation (ambient)

Storage

Bakeout at flange without electronics

- BPG402-S

- BPG402-SL

°C

0 … +50

-20 … +70

150

Supply voltage

+20 - +28 V / ≤0.8 A (dc)

Output signal analog

- Measurement range

- Voltage vs. pressure

- Error signal

- Load impedance, min.

0 - +10V

+0.774 - +10 V

0.75 V / Decade

0.1 / 0.3 / 0.5 V

10 kΩ

Digital functions

Degas

Interface (digital) 2)

RS232C

Emission control

Automatic / manual via interface

Filament

Two Yt2O3 coated Ir

Filament status

LED / digital output

Electrical connection

D-Sub, 15 pin, male

Cable length, max. 3)

100 m (330 ft)

Materials exposed to vacuum

Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass

Internal volume KF / CF

Weight KF / CF

Degree of protection

24 cm3 (1.46 in.3 ) / 34 cm3 (2.1 in.3 )

450 g / 710 g

IP30

1) Reduced accuracy during degas

2) Simultaneous use of RS232C or VGC40x and VGC50x series controllers and Fieldbus is not allowed

3) For RS232C operation

ORDERING INFORMATION

Part number

353-570 BPG402-S DN 25 ISO-KF

353-571 BPG402-S DN 40 CF-R

353-572 BPG402-S LCD, DN 25 ISO-KF

353-573 BPG402-S LCD, DN 40 CF-R

353-578 BPG402-SL long tube DN 40 CF-R

353-574 BPG402-SP PBus, DN 25 ISO-KF

353-575 BPG402-SP PBus, DN 40 CF-R

353-576 BPG402-SD DNet, DN 25 ISO-KF

353-577 BPG402-SD DNet, DN 40 CF-R

353-590 BPG402-SE ECAT, DN 25 ISO-KF

353-591 BPG402-SE ECAT, DN 40 CF-R

353-596 BPG402-SE ECAT, DN 25 ISO-KF

353-597 BPG402-SE ECAT, DN 40 CF-R

Accessories

353-511 Power supply BPG400 24VDC

353-512 Baffle for BPG400

211-113 Centering ring with baffle DN 25 KF

Spare parts

354-494 Spare sensor head BPG402 DN 25 ISO-KF

354-495 Spare sensor head BPG402 DN 40 CF-R

BPG402 Datasheet (Link Google Drive)
BPG402 manual (Link Google Drive)

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