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CDG 025D - INFICON
ü Ambient Capacitance Diaphragm Gauge
ü Brand: INFICON
ü Origin: Liechtenstein
ü Measurement range: 0.1 to 1000 Torr
ü Warranty: 6 months
- Thông tin sản phẩm
- Tài liệu
Inficon CDG025D - Ambient Capacitance Diaphragm Gauge
Đại lý ủy quyền INFICON phân phối thiết bị chính hãng tại Việt Nam (Inficon Vietnam)
The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments.
Advantages
ü Full scale (FS) ranges from 100 mTorr … 1000 Torr
ü Fast stability after power on
ü Fast recovery from atmospheric pressure
ü Corrosion resistant ceramic sensor
ü Excellent long term signal stability
ü Temperature compensated
ü Sensor protected from contamination
ü One push button zero function
ü Wide range power supply
ü Two setpoints (optional)
ü RS232 interface (optional)
Typical applications
ü Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
ü Data storage and display manufacturing equipment
ü Industrial vacuum equipment
ü General high accuracy pressure measurement
Specifications
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Full scale (FS) Torr / mbar |
1000/1100 ... 200 |
100 ... 5 |
2 ... 0.5 |
0.25 |
0.1 |
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Accuracy(1) |
0.2 % of reading |
0.25 % of reading |
0.5 % of reading |
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Temperature effect |
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on zero |
0.005 % FS / °C |
0.015 % FS / °C |
0.02 % FS / °C |
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on span |
0.01 % of reading / °C |
0.01 % of reading / °C |
0.03 % of reading / °C |
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Resolution |
0.003 % FS |
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Pressure, max. |
400 kPa (absolute) |
260 kPa (absolute) |
130 kPa (absolute) |
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Response time(2) |
30 ms |
130 ms |
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Lowest reading |
0.01 % FS |
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Lowest suggested |
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Reading |
0.05 % FS |
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Control pressure |
0.5 % FS |
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Temperature |
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Operation (ambient) |
+5 ... +50 °C |
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Bakeout at flange3) |
≤110 °C |
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Storage |
–40 ... +65 °C |
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Supply voltage |
+14 ... +30 V (dc) |
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Power consumption |
≤1 W |
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Output signal (analog) |
0 ... +10 V (dc) |
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Degree of protection |
IP 30 |
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Standards |
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CE conformity |
EN 61000-6-2, EN 61000-6-3, RoHS |
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ETL certification |
EN 61010, UL 61010-1, CSA 22.2 No.61010-1 |
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Electrical connection |
D-sub, 15-pin, male |
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Setpoint |
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Number of setpoints(4) |
2 (SP1, SP2) |
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Relay contact |
30 / ≤0.5 V (dc) / A (dc) |
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Hysteresis |
1 % FS |
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Materials exposed to vacuum |
ceramics (AI2 O3 ), Vacon 70, stainless steel (AISI 316L), AgCuTi hard solder, sealing glass |
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Internal volume |
≤4.0 cm3 |
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Weight |
285 … 342 g |
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(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after two hours operation (2) Increase 10 ... 90% FS (3) Non-operation (4) CDG025D-S only |
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ORDERING INFORMATION
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CDG025D, TEMPERATURE COMPENSATED |
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Full scale |
Flange type |
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Torr |
Pascal |
mbar |
1/2 in. tube |
DN 16 ISO-KF |
DN 16 CF-R |
8 VCR |
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1000 |
133322 |
1333 |
375-000 |
375-001 |
375-002 |
375-003 |
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100 |
13332 |
133 |
376-000 |
376-001 |
376-002 |
376-003 |
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10 |
1333 |
13.3 |
377-000 |
377-001 |
377-002 |
377-003 |
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1 |
133 |
1.3 |
378-000 |
378-001 |
378-002 |
378-003 |
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0.1 |
13.3 |
0.13 |
379-000 |
379-001 |
379-002 |
379-003 |
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CDG025D-S, WITH 2 SETPOINTS AND RS232 INTERFACE, TEMPERATURE COMPENSATED |
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Full scale |
Flange type |
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Torr |
Pascal |
mbar |
1/2 in. tube |
DN 16 ISO-KF |
DN 16 CF-R |
8 VCR |
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1000 |
133322 |
1333 |
375-300 |
375-301 |
375-302 |
375-303 |
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- |
110000 |
1100 |
375-500 |
375-501 |
375-502 |
375-503 |
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200 |
26664 |
267 |
382-300 |
382-301 |
382-302 |
382-303 |
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100 |
13332 |
133 |
376-300 |
376-301 |
376-302 |
376-303 |
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- |
10000 |
100 |
376-500 |
376-501 |
376-502 |
376-503 |
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20 |
2666 |
26.7 |
383-300 |
383-301 |
383-302 |
383-303 |
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10 |
1333 |
13.3 |
377-300 |
377-301 |
377-302 |
377-303 |
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- |
1000 |
10 |
377-500 |
377-501 |
377-502 |
377-503 |
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1 |
133 |
1.3 |
378-300 |
378-301 |
378-302 |
378-303 |
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- |
100 |
1 |
378-500 |
378-501 |
378-502 |
378-503 |
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0.25 |
33.3 |
0.33 |
385-300 |
385-301 |
385-302 |
385-303 |
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0.1 |
13.3 |
0.13 |
379-300 |
379-301 |
379-302 |
379-303 |
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- |
10 |
0.1 |
379-500 |
379-501 |
379-502 |
379-503 |
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