BPG400 - INFICON
ü ATM to Ultra High Vacuum Gauge
ü Brand: INFICON
ü Origin: Liechtenstein
ü Measurement range: 5×10-10 to ATM
ü Warranty: 12 months
- Thông tin sản phẩm
- Tài liệu
Inficon BPG400 – ATM to Ultra High Vacuum Gauge
Đại lý ủy quyền INFICON phân phối thiết bị chính hãng tại Việt Nam (Inficon Vietnam)
Dịch vụ của chúng tôi
ü Phân phối thiết bị Inficon chính hãng
ü Dịch vụ Bảo hành thiết bị Inficon
ü Dịch vụ sửa chữa thiết bị Inficon
ü Bảo dưỡng và hiệu chuẩn định kỳ thiết bị Inficon
Advantages
ü Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
ü Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
ü The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
ü Long-life yttrium oxide coated iridium filament
ü Optional graphic display and Fieldbus interfaces available
ü Automatic high vacuum Pirani adjustment reduces operator interventions
ü RoHS compliance
ü General vacuum measurement and control in the low to ultra high vacuum range
Typical applications
ü Pressure measurement in semiconductor process and transfer chambers
ü Industrial coating
ü General vacuum measurement and control in the low to ultra high vacuum range
Specifications
|
Measurement range (air, O2, CO, N2) |
Mbar Torr |
5×10-10 … 1000 3.8×10-10 … 750 |
|
Accuracy 10-8 … 10-2 mbar |
% of reading |
±15% |
|
Repeatability (air) 10-8 … 10-2 mbar |
% of reading |
5% |
|
Temperature Operation (ambient) Storage Bakeout at flange with extension Bakeout at flange without extension Bakeout electronics removed |
°C °C °C °C °C |
0 … +50 -20 … +70 150 80 150 |
|
Supply voltage |
|
+20 - +28 V / ≤0.8 A (dc) |
|
Materials exposed to vacuum |
|
Yt2O3, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass |
ORDERING INFORMATION
|
BPG400 |
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PART NUMBER |
|
BPG400 DN 25 ISO-KF |
|
353-500 |
|
BPG400 LCD, DN 25 ISO-KF |
|
353-501 |
|
BPG400 DN 40 CF-R |
|
353-502 |
|
BPG400 LCD, DN 40 CF-R |
|
353-503 |
|
BPG400-SP PBus, DN 25 ISO-KF |
|
353-505 |
|
BPG400-SP PBus, DN 40 CF-R |
|
353-506 |
|
BPG400-SD DNet, DN 25 ISO-KF |
|
353-507 |
|
BPG400-SD DNet, DN 40 CF-R |
|
353-508 |
|
Accessories |
|
|
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Power supply BPG400 24VDC |
|
353-511 |
|
100 mm sensor extension tube |
|
353-510 |
|
Baffle for BPG400 |
|
353-512 |
|
Centering ring with baffle DN 25 KF |
|
211-113 |
|
Spare parts |
|
|
|
Spare sensor head BPG400, DN 25 ISO-KF |
|
354-490 |
|
Spare sensor head BPG400, DN 40 CF-R |
|
354-491 |
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Hỗ trợ trực tuyến
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Hotline tư vấn Call/Zalo: 0919995040 |
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Yêu cầu hỗ trợ Báo giá: Kỹ thuật: Hoannv@sumore.vn |






